Semiconductor device with gate stack

A semiconductor device is provided. The semiconductor device includes a gate stack over a semiconductor substrate and a spacer element over a sidewall of the gate stack. The spacer element has a lower portion and an upper portion, the lower portion has a substantially uniform width. The upper portio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hung, Hua-Li, Hsia, Ying-Ting, Lu, Chih-Lun, Huang, Hsu-Yu, Yin, Tsung-Fan, Hsu, Li-Te, Chiu, Yi-Wei
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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