Optically aligned hybrid semiconductor device and method

Two semiconductor chips are optically aligned to form a hybrid semiconductor device. Both chips have optical waveguides and alignment surface positioned at precisely-defined complementary vertical offsets from optical axes of the corresponding waveguides, so that the waveguides are vertically aligne...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Nuttall, Nathan A, Klein, Holger N, Blumenthal, Daniel J, Desai, Kishor V, Novack, Ari Jason, Shi, Ruizhi, Kinghorn, David Henry, Hochberg, Michael J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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