Hydrogenated silane composition

The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of a linear hydrogenated silane having Si atoms of 5 or less to a cyclic hydrogenated silane having Si atoms of 5 to 7 is 0.009 or less, wherein the cyclic hydrogenated silane...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mizushima, Chiho, Kamiyama, Takuya, Abe, Takashi, Akiyama, Tatsuhiko
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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