Bulk acoustic wave resonator and filter including the same

Bulk acoustic wave resonator and filter including the same

A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode disposed on the substrate, and a piezoelectric layer disposed between the first electrode and the second electrode. At least one of the first electrode and the second electrode includes an alloy of molybden...

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Hauptverfasser: Lee, Hwa Sun, Shin, Ran Hee, Lee, Tae Kyung, Shin, Seung Joo, Han, Sung
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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creator Lee, Hwa Sun
Shin, Ran Hee
Lee, Tae Kyung
Shin, Seung Joo
Han, Sung
description A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode disposed on the substrate, and a piezoelectric layer disposed between the first electrode and the second electrode. At least one of the first electrode and the second electrode includes an alloy of molybdenum and tantalum.
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title Bulk acoustic wave resonator and filter including the same
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