Electrostatic chuck device

An electrostatic chuck device includes: a placing plate having a placement surface on which a plate-like sample is placed on one side thereof; an electrostatic attraction electrode provided on the other side of the first ceramic plate; and a first organic insulating layer provided between the first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Maeta, Shinichi, Kosakai, Mamoru, Maeda, Keisuke
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CORONA DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES OVERVOLTAGE ARRESTERS USING SPARK GAPS SEMICONDUCTOR DEVICES SPARK GAPS SPARKING PLUGS
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Beschreibung
Zusammenfassung:	An electrostatic chuck device includes: a placing plate having a placement surface on which a plate-like sample is placed on one side thereof; an electrostatic attraction electrode provided on the other side of the first ceramic plate; and a first organic insulating layer provided between the first ceramic plate and the electrostatic attraction electrode. The electrostatic chuck device further has a supporting plate provided between the first organic insulating layer and the electrostatic attraction electrode.