Probe pins with etched tips for electrical die test

A prober head to interface an E-testing apparatus to a device under test, which may be an unpackaged die, for example. In some embodiments, the prober head includes an array of conductive pins, each of the pins extending outwardly from a first pin end anchored to a substrate. At least a partial leng...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Xu, Dingying, Albertson, Todd P, Stanford, Joseph D, Mamodia, Mohit, Craig, David
Format: Patent
Sprache:eng
Schlagworte:
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