Power deposition control in inductively coupled plasma (ICP) reactors

Embodiments of inductively coupled plasma (ICP) reactors are provided herein. In some embodiments, a dielectric window for an inductively coupled plasma reactor includes: a body including a first side, a second side opposite the first side, an edge, and a center, wherein the dielectric window has a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Todorow, Valentin N, Banna, Samer, Tantiwong, Kyle, Yuen, Stephen, Gung, Tza-Jing, Marohl, Dan A, Knyazik, Vladimir
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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