Molybdenum selenide sublayers with controlled thickness in solar cells and methods for forming the same

A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and th...

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Hauptverfasser: Yen, Wen-Tsai, Lee, Wen-Chin, Chen, Shih-Wei, Wu, Chung-Hsien, Chen, Kuan-Chu
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Lee, Wen-Chin
Chen, Shih-Wei
Wu, Chung-Hsien
Chen, Kuan-Chu
description A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and the molybdenum silicide layer. The molybdenum silicide layer is produced by forming a molybdenum layer or a molybdenum nitride layer or a molybdenum oxide layer over an initially formed molybdenum layer such that an interface exists between the two layers. A selenization and sulfurization process is carried out to selectively convert the molybdenum-containing layer to molybdenum selenide but not the original molybdenum back electrode layer which remains as a molybdenum layer.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Molybdenum selenide sublayers with controlled thickness in solar cells and methods for forming the same
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