Force detection sensor having a base member with a force receiving surface and another surface with an interdigital electrode

A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and an inter-digital electrode placed on the second surface. Further, the second surface deforms when the first surfa...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Kamiya, Toshiyuki
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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