Edge ring centering method using ring dynamic alignment data

A system for determining an alignment of an edge ring on a substrate support includes a robot control module configured to control a robot to place the edge ring onto the substrate support and retrieve the edge ring from the substrate support. An alignment module is configured to determine a plurali...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Estoque, Marc, Yan, Haoquan, Tan, Ali Sucipto, Genetti, Damon Tyrone, McChesney, Jon, Paterson, Alexander Miller
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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