Semiconductor device including isolation regions

Semiconductor device including isolation regions

A semiconductor device including a device isolation region is provided. The semiconductor device includes first active regions disposed on a substrate, and an isolation region between the active regions. The isolation region includes a first portion formed of a first insulating material, and a secon...

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Hauptverfasser: Ha, Dae Won, Yang, Kwang Yong, Hwang, Dong Hoon, Baek, Jong Hwa, Ha, Seung Mo, Park, Jae Young, Jeon, Jong Min, Sun, Min-Chul, Chung, Young Su
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator Ha, Dae Won
Yang, Kwang Yong
Hwang, Dong Hoon
Baek, Jong Hwa
Ha, Seung Mo
Park, Jae Young
Jeon, Jong Min
Sun, Min-Chul
Chung, Young Su
description A semiconductor device including a device isolation region is provided. The semiconductor device includes first active regions disposed on a substrate, and an isolation region between the active regions. The isolation region includes a first portion formed of a first insulating material, and a second portion formed of a second insulating material, having different characteristics from those of the first insulating material. The first portion is closer to the first active regions than the second portion. The second portion has a bottom surface having a height different from that of a bottom surface of the first portion.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor device including isolation regions
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