Systems of bonded substrates and methods for bonding substrates with bonding layers

A system of bonded substrates may include a first substrate, a second substrate, and a bonding layer. The first substrate may include a bonding surface, wherein a geometry of the bonding surface of the first substrate includes a plurality of microchannels. The second substrate may include a compleme...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Joshi, Shailesh N, Noguchi, Masao
Format: Patent
Sprache:eng
Schlagworte:
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