Semiconductor device structures

A method of forming a semiconductor structure comprises forming pools of acidic or basic material in a substrate structure. A resist is formed over the pools of acidic or basic material and the substrate structure. The acidic or basic material is diffused from the pools into portions of the resist p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	deVilliers, Anton J, Brown, William R, Eom, Ho Seop, Jain, Kaveri, Olson, Adam L, Chen, Xue (Gloria), Gou, Lijing
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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