Ion milling device and processing method using the ion milling device

This ion milling device is provided with a vacuum chamber (105), an exhaust device (101) for evacuating the interior of the vacuum chamber, a sample stage (103) for supporting a sample (102) to be irradiated inside the vacuum chamber, a heater (107) for heating the interior of the vacuum chamber, a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Takasu, Hisayuki, Muto, Hirobumi, Kamino, Atsushi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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