Optical displacement sensor element

The present invention relates to an optical displacement sensor comprising a first at least partially reflective surface and a second surface having a diffractive pattern, the surfaces being provided on elements having a variable distance between them, each surface pair defining a cavity between the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Johansen, Ib-Rune, Lacolle, Matthieu, Bakke, Thor, Bjor, Ole-Herman
Format: Patent
Sprache:eng
Schlagworte:
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