Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of pyrazole compounds and bisepoxides

Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of pyrazole compounds and bisepoxides to electroplate the photoresist defined features. Such fe...

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Hauptverfasser: Niazimbetova, Zuhra, Pokhrel, Ravi, Scalisi, Mark, Thorseth, Matthew, Byrnes, James, Dziewiszek, Joanna
Format: Patent
Sprache:eng
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Zusammenfassung:Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of pyrazole compounds and bisepoxides to electroplate the photoresist defined features. Such features include pillars, bond pads and line space features.