Autofocus method and autofocus device

The invention is based on an autofocus method in which light from a light source is focused at a measurement light focus in a sample and is reflected from there and the reflected light is guided through an optical system in two light paths onto at least two detector elements. In order to achieve fas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hensler, Sven, Hing, Paul
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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