Selective formation of conductor nanowires

A method includes etching a mandrel layer to form mandrel strips, and selectively depositing metal lines on sidewalls of the mandrel strips. During the selective deposition, top surfaces of the mandrel strips are masked by dielectric masks. The method further includes removing the mandrel layer and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Peng, Chao-Hsien, Shue, Shau-Lin, Lee, Hsiang-Huan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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