Method for roughening the surface of a metal layer, thin film transistor, and method for fabricating the same

The disclosure discloses a method for roughening a surface of a metal layer, a thin film transistor, and a method for fabricating the same. The method for roughening the surface of a metal layer includes: forming a first photo-resist layer on the surface of the metal layer, and processing the first...

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Hauptverfasser: Ning, Ce, Wang, Jiushi, Zhang, Fangzhen, Lv, Zhijun, Li, Wusheng, Choi, Seung Jin, Feng, Jing
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creator Ning, Ce
Wang, Jiushi
Zhang, Fangzhen
Lv, Zhijun
Li, Wusheng
Choi, Seung Jin
Feng, Jing
description The disclosure discloses a method for roughening a surface of a metal layer, a thin film transistor, and a method for fabricating the same. The method for roughening the surface of a metal layer includes: forming a first photo-resist layer on the surface of the metal layer, and processing the first photo-resist layer at high temperature; and stripping the first photo-resist layer to roughen the surface of the metal layer.
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
title Method for roughening the surface of a metal layer, thin film transistor, and method for fabricating the same
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