Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device
A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device an...
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| creator | Kim, Hyun-Bae Soh, Sang-Yoon Choi, Young-Hwan Kim, Jin-Ho |
| description | A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner. |
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The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.</description><language>eng</language><subject>APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS ; BASIC ELECTRIC ELEMENTS ; BASIC ELECTRONIC CIRCUITRY ; CALCULATING ; CODE CONVERSION IN GENERAL ; CODING ; COMPUTING ; CONTROL OR REGULATION THEREOF ; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; COUNTING ; DECODING ; ELECTRIC DIGITAL DATA PROCESSING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; GENERATION ; PHYSICS ; PULSE TECHNIQUE</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191112&DB=EPODOC&CC=US&NR=10474184B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191112&DB=EPODOC&CC=US&NR=10474184B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Kim, Hyun-Bae</creatorcontrib><creatorcontrib>Soh, Sang-Yoon</creatorcontrib><creatorcontrib>Choi, Young-Hwan</creatorcontrib><creatorcontrib>Kim, Jin-Ho</creatorcontrib><title>Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device</title><description>A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. 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The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY CALCULATING CODE CONVERSION IN GENERAL CODING COMPUTING CONTROL OR REGULATION THEREOF CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER COUNTING DECODING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERATION PHYSICS PULSE TECHNIQUE |
| title | Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device |
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