Emission noise correction of a charged particle source

A method of operating a charged particle microscope comprising the following steps: - Providing a specimen on a specimen holder; - Using a source to produce a beam of charged particles that is subject to beam current fluctuations; - Employing a beam current sensor, located between said source and sp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mele, Luigi, Mohammadi-Gheidari, Ali, van Veen, Gerard Nicolaas Anne, Slingerland, Hendrik Nicolaas, Tiemeijer, Peter Christiaan
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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