Method for fabricating RF resonators and filters

A method of manufacturing an RF filter composed of a resonator array, comprises: obtaining a removable carrier; growing a piezoelectric film; applying a first electrode to a film; preparing a back film on a silicon cover; attaching the back film to the first electrode; separating the removable carri...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Hurwitz, Dror
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
Online-Zugang:	Volltext bestellen
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