Thermal driven MEMS tunable filter
A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable d...
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| creator | Wang, Congshun Zhao, Jing Jin, Guanghai |
| description | A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel. |
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The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.</description><language>eng</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; RADIATION PYROMETRY ; TESTING</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191001&DB=EPODOC&CC=US&NR=10429634B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20191001&DB=EPODOC&CC=US&NR=10429634B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Wang, Congshun</creatorcontrib><creatorcontrib>Zhao, Jing</creatorcontrib><creatorcontrib>Jin, Guanghai</creatorcontrib><title>Thermal driven MEMS tunable filter</title><description>A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFAKyUgtyk3MUUgpyixLzVPwdfUNVigpzUtMyklVSMvMKUkt4mFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8aHBhgYmRpZmxiZORsbEqAEAgAslrw</recordid><startdate>20191001</startdate><enddate>20191001</enddate><creator>Wang, Congshun</creator><creator>Zhao, Jing</creator><creator>Jin, Guanghai</creator><scope>EVB</scope></search><sort><creationdate>20191001</creationdate><title>Thermal driven MEMS tunable filter</title><author>Wang, Congshun ; Zhao, Jing ; Jin, Guanghai</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10429634B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2019</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Wang, Congshun</creatorcontrib><creatorcontrib>Zhao, Jing</creatorcontrib><creatorcontrib>Jin, Guanghai</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Wang, Congshun</au><au>Zhao, Jing</au><au>Jin, Guanghai</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Thermal driven MEMS tunable filter</title><date>2019-10-01</date><risdate>2019</risdate><abstract>A microelectrical mechanical system (MEMS) implementation of tunable Fabry Perot filter devices is disclosed. The advantages associated with the use of these tunable etalons include increases in aperture size, displacement, reliability, and a reduction in cost. In some examples, integrated tunable detectors in miniature spectrometers using a thermal driven MEMS Fabry-Perot tunable filter are provided. Other examples use integrated thermal driven tunable MEMS Fabry-Perot filter to select fiber optical communication channel.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING |
| title | Thermal driven MEMS tunable filter |
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