Temperature gradient in microfabricated sensor cavity

A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor ca...

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Bibliographische Detailangaben

Hauptverfasser:	French, William, Brockie, Nathan, Dyer, Terry, Parsa, Roozbeh, Mirgorodski, Iouri N, Gabrys, Ann
Format:	Patent
Sprache:	eng
Schlagworte:	HOROLOGY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING TIME-INTERVAL MEASURING
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