Semiconductor memory device and method for manufacturing the same

A semiconductor memory device according to the embodiment includes a substrate, electrodes, at least one pillar structure, at least one charge storage film, and at least one insulating member. The electrodes are provided on the substrate, are separately stacked each other, and constitute a stacked b...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Matsuura, Osamu, Inokuma, Hideki, Fujita, Masanari
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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