Substrate storage and processing

The system, method and apparatus described relates generally to a device related to substrate storage and processing. In one example embodiment to methods, apparatus, and systems of a substrate storage and processing module improving upon existing devices used in one or more instances for substrate...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Wohanka, Christian, Schober, Thomas, Fenner, Yves, Rahrbach, Bernd, Dovids, Gerhard
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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