Semiconductor device with recessed channel array transistor (RCAT) including a superlattice

A semiconductor device may include a substrate, at least one memory array comprising a plurality of recessed channel array transistors (RCATs) on the substrate, and periphery circuitry adjacent the at least one memory array and including a plurality of complementary metal oxide (CMOS) transistors on...

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Bibliographische Detailangaben

1. Verfasser:	Rao, Kalipatnam Vivek
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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