Vacuum gate valve

A vacuum gate valve includes a valve body open/close drive body provided between opposing housing bodies, a stem of the valve body open/close drive body, and a valve body provided to the stem. The housing bodies each has a piston rod vertically moving by a cylinder mechanism, a cam member of the pis...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Iwabuchi, Toshiaki
Format: Patent
Sprache:eng
Schlagworte:
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