Semiconductor device and method of manufacturing the semiconductor device

Properties of a semiconductor device are improved. A semiconductor device having a superjunction structure, in which p-type column regions and n-type column regions are periodically arranged, is configured as follows. Each n-type column region has a vertical section including an n-type epitaxial lay...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Saito, Shigeaki, Abiko, Yuya, Eguchi, Satoshi, Taniguchi, Daisuke, Yamaguchi, Natsuo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!