Systems and methods for automated multi-zone detection and modeling

A semiconductor tool includes an illumination source to generate an illumination beam, one or more illumination optical elements to direct a portion of the illumination beam to a sample, a detector, one or more collection optical elements to direct radiation emanating from the sample to the detector...

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Bibliographische Detailangaben
Hauptverfasser:	Sparka, Christian, Pierson, William, Sherwin, Stuart, Nabeth, Jeremy, Karur-Shanmugam, Ramkumar, Anis, Fatima, Demirer, Onur N, Smith, Mark D, Heo, Hoyoung, Hoong Hoo, Choon (George)
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GYROSCOPIC INSTRUMENTS HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION ORIGINALS THEREFOR PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SURVEYING TESTING
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