Automated TEM sample preparation

Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the...

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Bibliographische Detailangaben
Hauptverfasser: Stone, Stacey, Trivedi, Dhruti, Brogden, Valerie, Young, Richard J, Miller, Thomas G, Templeton, Todd, Routh, Jr., Brian Roberts, Schmidt, Michael, Blackwood, Jeffrey
Format: Patent
Sprache:eng
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