Monomer, organic layer composition, organic layer, and method of forming patterns

A monomer, an organic layer composition including the monomer, an organic layer, and a method of forming patterns, the monomer being represented by Chemical Formula 1:

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Bibliographische Detailangaben
Hauptverfasser: Park, You-Jung, Park, Yu-Shin, Song, Hyun-Ji, Choi, Yoo-Jeong, Kim, Yun-Jun
Format: Patent
Sprache:eng
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