Onsite ultra high purity chemicals or gas purification

An onsite purification plant/system to delivery high and ultra high purity product, such as, process chemicals, industrial and specialty gases to manufacturing processes within the onsite plant turndown ratio from 0% to 100% while preserving the predetermined purity of the supplied substances within...

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Hauptverfasser: Booth, Thomas M, Lindenmuth, Brian M, Hopkins, Jeffrey Alan, Gershtein, Vladimir Yliy, Conway, Timothy Edward
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Sprache:eng
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creator Booth, Thomas M
Lindenmuth, Brian M
Hopkins, Jeffrey Alan
Gershtein, Vladimir Yliy
Conway, Timothy Edward
description An onsite purification plant/system to delivery high and ultra high purity product, such as, process chemicals, industrial and specialty gases to manufacturing processes within the onsite plant turndown ratio from 0% to 100% while preserving the predetermined purity of the supplied substances within a predefined specification range is provided. Preserving liquid/vapor ratio in at least one of the purification means/units ensuring that product purity range stays unchanged is achieved by redirecting the product back into the onsite purification plant/system.
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subjects BLASTING
COMBINED HEATING AND REFRIGERATION SYSTEMS
HEAT PUMP SYSTEMS
HEATING
LIGHTING
LIQUEFACTION SOLIDIFICATION OF GASES
LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS
MANUFACTURE OR STORAGE OF ICE
MECHANICAL ENGINEERING
MIXTURES BY PRESSURE AND COLD TREATMENT
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
REFRIGERATION OR COOLING
SEPARATION
TRANSPORTING
WEAPONS
title Onsite ultra high purity chemicals or gas purification
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