Automated replacement of consumable parts using interfacing chambers

A cluster tool assembly includes a vacuum transfer module, a process module having a first side connected to the vacuum transfer module. An isolation valve having a first side and a second side, the first side of the isolation valve coupled to a second side of the process module. A replacement stati...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ngo, Austin, Witkowicki, Derek John, Genetti, Damon Tyrone, McChesney, Jon, Paterson, Alex
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!