Columnar laminar flow generation device and method for generating columnar laminar flows

A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall o...

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Bibliographische Detailangaben

Hauptverfasser:	Ito, Takahiro, Khumpuang, Sommawan, Okuda, Shuuji, Hara, Shiro, Sensu, Yoshihisa, Takeuchi, Sho
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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