Columnar laminar flow generation device and method for generating columnar laminar flows

A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall o...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Ito, Takahiro, Khumpuang, Sommawan, Okuda, Shuuji, Hara, Shiro, Sensu, Yoshihisa, Takeuchi, Sho
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

container_end_page
container_issue
container_start_page
container_title
container_volume
creator	Ito, Takahiro Khumpuang, Sommawan Okuda, Shuuji Hara, Shiro Sensu, Yoshihisa Takeuchi, Sho
description	A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.
format	Patent
fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US10286426B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US10286426B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US10286426B23</originalsourceid><addsrcrecordid>eNrjZIhwzs8pzc1LLFLISczNBNFpOfnlCumpealFiSWZ-XkKKallmcmpCol5KQq5qSUZ-SkKaflFcAV56QrJ2Ewo5mFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFiclAE0riQ4MNDYwszEyMzJyMjIlRAwDRPTrV</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Columnar laminar flow generation device and method for generating columnar laminar flows</title><source>esp@cenet</source><creator>Ito, Takahiro ; Khumpuang, Sommawan ; Okuda, Shuuji ; Hara, Shiro ; Sensu, Yoshihisa ; Takeuchi, Sho</creator><creatorcontrib>Ito, Takahiro ; Khumpuang, Sommawan ; Okuda, Shuuji ; Hara, Shiro ; Sensu, Yoshihisa ; Takeuchi, Sho</creatorcontrib><description>A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; CLEANING ; CLEANING IN GENERAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2019</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190514&DB=EPODOC&CC=US&NR=10286426B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20190514&DB=EPODOC&CC=US&NR=10286426B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Ito, Takahiro</creatorcontrib><creatorcontrib>Khumpuang, Sommawan</creatorcontrib><creatorcontrib>Okuda, Shuuji</creatorcontrib><creatorcontrib>Hara, Shiro</creatorcontrib><creatorcontrib>Sensu, Yoshihisa</creatorcontrib><creatorcontrib>Takeuchi, Sho</creatorcontrib><title>Columnar laminar flow generation device and method for generating columnar laminar flows</title><description>A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2019</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZIhwzs8pzc1LLFLISczNBNFpOfnlCumpealFiSWZ-XkKKallmcmpCol5KQq5qSUZ-SkKaflFcAV56QrJ2Ewo5mFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFiclAE0riQ4MNDYwszEyMzJyMjIlRAwDRPTrV</recordid><startdate>20190514</startdate><enddate>20190514</enddate><creator>Ito, Takahiro</creator><creator>Khumpuang, Sommawan</creator><creator>Okuda, Shuuji</creator><creator>Hara, Shiro</creator><creator>Sensu, Yoshihisa</creator><creator>Takeuchi, Sho</creator><scope>EVB</scope></search><sort><creationdate>20190514</creationdate><title>Columnar laminar flow generation device and method for generating columnar laminar flows</title><author>Ito, Takahiro ; Khumpuang, Sommawan ; Okuda, Shuuji ; Hara, Shiro ; Sensu, Yoshihisa ; Takeuchi, Sho</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10286426B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2019</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Ito, Takahiro</creatorcontrib><creatorcontrib>Khumpuang, Sommawan</creatorcontrib><creatorcontrib>Okuda, Shuuji</creatorcontrib><creatorcontrib>Hara, Shiro</creatorcontrib><creatorcontrib>Sensu, Yoshihisa</creatorcontrib><creatorcontrib>Takeuchi, Sho</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Ito, Takahiro</au><au>Khumpuang, Sommawan</au><au>Okuda, Shuuji</au><au>Hara, Shiro</au><au>Sensu, Yoshihisa</au><au>Takeuchi, Sho</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Columnar laminar flow generation device and method for generating columnar laminar flows</title><date>2019-05-14</date><risdate>2019</risdate><abstract>A columnar laminar flow generation device includes: a placement part on which to place a processing target; a gas blow-out part having an opening; and a gas suction path; wherein the placement part is positioned in a space whose outer periphery surface is constituted by extending the interior wall of the opening in the direction vertical to the opening; the opening has, in its interior wall, a gas blow-out port through which a gas is blown out in one direction vertical to the opening; and the gas suction path is formed in such a way that it suctions the gas in the direction opposite to the one in which the gas is blown out. The columnar laminar generation device is capable of generating columnar laminar flows.</abstract><oa>free_for_read</oa></addata></record>
fulltext	fulltext_linktorsrc
identifier
ispartof
issn
language	eng
recordid	cdi_epo_espacenet_US10286426B2
source	esp@cenet
subjects	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
title	Columnar laminar flow generation device and method for generating columnar laminar flows
url	https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-28T00%3A24%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Ito,%20Takahiro&rft.date=2019-05-14&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS10286426B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true