Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting method

A wafer carrying fork includes a fork body, a plurality of wafer suction holes, a plurality of gas purging elements, a plurality of gas purging pipes, a plurality of gas suction elements, and a plurality of gas suction pipes. The fork body has a top surface, a bottom surface opposite to the top surf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Liu, Yan-Hong, Chen, Che-Fu, Li, Meng-Chu
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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