Low force wafer test probe with variable geometry

A system for testing functionality of die on a wafer including a plurality of contacts includes a support structure and a plurality of probes mounted to the support structure in an array. A configuration of each of the plurality of probes varies based on a position of the probe within the array to m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Conti, Dennis R, Audette, David M, Knox, Marc D, Wagner, Grant W
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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