Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly

Provided is an ion beam processing apparatus including an ion generation chamber, a processing chamber, and electrodes to form an ion beam by extracting ions generated in the ion generation chamber to the processing chamber. The electrodes includes a first electrode disposed close to the ion generat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Okamoto, Naoyuki, Suzuki, Fumihito, Tsujiyama, Masashi, Yasumatsu, Yasushi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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