Pressure detection unit and pressure sensor using the same

A pressure detection unit and a pressure sensor using the same capable of suppressing an increase in manufacturing man-hours due to use of an additional member, and ensuring insulation of a semiconductor type pressure detection device. The pressure detection unit includes a base formed in a lid shap...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tamura, Youko, Mukai, Motohisa, Aoyama, Tomohisa
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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