Pressure detection unit and pressure sensor using the same

Pressure detection unit and pressure sensor using the same

A pressure detection unit and a pressure sensor using the same capable of suppressing an increase in manufacturing man-hours due to use of an additional member, and ensuring insulation of a semiconductor type pressure detection device. The pressure detection unit includes a base formed in a lid shap...

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Hauptverfasser: Tamura, Youko, Mukai, Motohisa, Aoyama, Tomohisa
Format: Patent
Sprache:eng
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MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator Tamura, Youko
Mukai, Motohisa
Aoyama, Tomohisa
description A pressure detection unit and a pressure sensor using the same capable of suppressing an increase in manufacturing man-hours due to use of an additional member, and ensuring insulation of a semiconductor type pressure detection device. The pressure detection unit includes a base formed in a lid shape and made of ceramic, a receiving member formed in a plate shape, a diaphragm interposed between the base and the receiving member, a semiconductor type pressure detection device installed on a side of a pressure receiving space formed between the base and the diaphragm in the base, and terminal pins electrically connected to the semiconductor type pressure detection device. The terminal pins penetrate the base, where a metal layer is provided in a region around the semiconductor type pressure detection device on a surface of the base on the side of the pressure receiving space.
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subjects MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title Pressure detection unit and pressure sensor using the same
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