Vertical chromatic confocal scanning method and system

A method of scanning a surface of an object using a confocal imaging system comprises the steps of obtaining first, second and third confocal images of the surface of the object when the object is illuminated respectively by light rays having first, second and third spectral waveforms, and using a c...

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Bibliographische Detailangaben

Hauptverfasser:	Sze, Wui Fung, Deng, Jiangwen, Song, Lei
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION
Online-Zugang:	Volltext bestellen
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