Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features
Copper electroplating baths and methods enable the plating of photoresist defined megafeatures at high current densities which have substantially uniform morphology and reduced nodule development. The copper electroplating baths include a mixture of heterocyclic nitrogen containing copolymers which...
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| creator | Niazimbetova, Zuhra Scalisi, Mark Hazebrouck, Rebecca Thorseth, Matthew Dziewiszek, Joanna |
| description | Copper electroplating baths and methods enable the plating of photoresist defined megafeatures at high current densities which have substantially uniform morphology and reduced nodule development. The copper electroplating baths include a mixture of heterocyclic nitrogen containing copolymers which provide megafeatures having a good % TIR and % WID balance. |
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| subjects | APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS |
| title | Copper electroplating baths and electroplating methods capable of electroplating megasized photoresist defined features |
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