Nozzle and etching apparatus

A nozzle for use in an etching apparatus and an etching apparatus including the nozzle are provided. The nozzle includes: a hollowed main body having a connector at one end thereof and a main-body outlet at the other end thereof, a main-body connection part being provided at an outer wall of the mai...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Huang, Eryuan, Zi, Yubao, Ding, Xilong, Wang, Chengsheng, Wu, Zhaozeng, Liu, Zuhong
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!