Liner recess for fully aligned via

Liner recess for fully aligned via

Devices and methods of fabricating devices are provided. One method includes: obtaining an intermediate semiconductor device having a dielectric layer, an insulating layer, and a plurality of metal lines, including a liner material and a first metal material; recessing the metal material of each met...

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Hauptverfasser: Ryan, Errol Todd, Lin, Sean Xuan
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Lin, Sean Xuan
description Devices and methods of fabricating devices are provided. One method includes: obtaining an intermediate semiconductor device having a dielectric layer, an insulating layer, and a plurality of metal lines, including a liner material and a first metal material; recessing the metal material of each metal line forming a set of cavities; filling the cavities with a protective cap; etching the protective cap and the liner material in the set of cavities; depositing a plurality of dielectric caps in the set of cavities; depositing an interlayer dielectric layer over the insulating layer and the plurality of dielectric caps; patterning a via in the interlayer dielectric layer; and depositing a lining and a second metal material in the interconnect area; wherein the second metal material is electrically insulated from the first metal in at least one of the plurality of metal lines.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Liner recess for fully aligned via
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