High purity gas purifier

High-purity gas purifiers for purification of corrosive gases, such as halogen gases or halide gases, and noncorrosive gases, such as hydrogen and inert gases, methods of making and methods of using the gas purifiers, are described. The gas purifier includes a housing made of nickel or stainless ste...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shogren, Peter K, Pereira, Stenio da Costa, Gipson, Rocky D
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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