Angular velocity sensor element and angular velocity sensor using same

An angular velocity sensor element includes a fixing part, an extension part, a twisted extension part, a drive vibrator, a detection vibrator, and a counter beam. The extension part has a first end coupled to the fixing part, and a second end. The twisted extension part has a first end coupled to t...

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Bibliographische Detailangaben
1. Verfasser: Yamamoto, Kensaku
Format: Patent
Sprache:eng
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