Capacitive physical quantity sensor
A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, a second substrate, a signal applying unit, a C-V conversion circuit, and an auxiliary electrode. The auxiliary electrode is disposed from a portion of the second substrate which faces the movab...
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| Sprache: | eng |
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| Zusammenfassung: | A capacitive physical quantity sensor includes a first substrate, a movable electrode, a fixed electrode, a second substrate, a signal applying unit, a C-V conversion circuit, and an auxiliary electrode. The auxiliary electrode is disposed from a portion of the second substrate which faces the movable electrode to a portion of the second substrate which faces a displaceable region of the movable electrode. The signal applying unit applies a predetermined potential to the auxiliary electrode at the time of self-diagnosis, to thereby increase a density of electric force lines generated between the fixed electrode located in a direction of displacing the movable electrode and the movable electrode. |
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