Lithographic apparatus

A lithographic apparatus has a compartment which accommodates a movable object. Movements of the movable object cause acoustic disturbances in the compartment. An acoustic damper is arranged to damp the acoustic disturbances in the compartment and comprises a chamber (100) in communication with the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Van Boxtel, Frank Johannes Jacobus, Nakiboglu, Günes, Van Duijnhoven, Martinus, Rijs, Robertus Mathijs Gerardus, Van Der Wijst, Marc Wilhelmus Maria, Kerssemakers, Sander, Boogaard, Gerard Johannes, Baggen, Mark Constant Johannes, Van Den Boogaert, Erwin Antonius Henricus Franciscus, Kemper, Nicolaas Rudolf, Verdonschot, Jessica Henrica Anna, Cox, Hendrikus Herman Marie
Format:	Patent
Sprache:	eng
Schlagworte:	ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MUSICAL INSTRUMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SOUND-PRODUCING DEVICES
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