Examination device

The present invention provides an inspection device that is capable of detecting foreign matter with high accuracy, the inspection device including: a light source; an electro-optic element on which light from the light source is incident and which changes a phase of the light into at least two stat...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Makuuchi, Masami, Hamamatsu, Akira, Ogawa, Kazuma
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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